Filing

Form 3

Form 3

0001181431-05-003481·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0001181431-05-003481
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 19, 2005
Reporting period: Jan 10, 2005
Description: Initial ownership

Documents

0001181431-05-003481-index.htm

Complete submission

0001181431-05-003481.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC