Filing

SC 13G

SC 13G

0000895345-05-000183·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0000895345-05-000183
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 16, 2005
Reporting period: —
Description: Passive 5%+ stake

Documents

0000895345-05-000183-index.htm

Complete submission

0000895345-05-000183.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC