SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0000315066-05-000452
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 14, 2005
Reporting period: —
Description: Passive 5%+ stake

Documents

0000315066-05-000452-index.htm

Complete submission

0000315066-05-000452.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC