Filing

Form 3

Form 3

0001181431-05-030017·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0001181431-05-030017
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: May 24, 2005
Reporting period: May 23, 2005
Description: Initial ownership

Documents

0001181431-05-030017-index.htm

Complete submission

0001181431-05-030017.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC