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Filing metadata

Accession number: 0001181431-06-000466
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 04, 2006
Reporting period: Dec 30, 2005
Description: Insider transaction

Documents

0001181431-06-000466-index.htm

Complete submission

0001181431-06-000466.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC