Filing

SC 13G

SC 13G

0000913414-07-001593·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0000913414-07-001593
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 23, 2007
Reporting period: Dec 31, 2006
Description: Passive 5%+ stake

Documents

0000913414-07-001593-index.htm

Complete submission

0000913414-07-001593.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC