Filing

SC 13G

SC 13G

0000814375-07-000054·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0000814375-07-000054
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 13, 2007
Reporting period: Dec 31, 2006
Description: Passive 5%+ stake

Documents

0000814375-07-000054-index.htm

Complete submission

0000814375-07-000054.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC

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