Filing

SC 13G

SC 13G

0000932471-02-000276·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0000932471-02-000276
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 12, 2002
Reporting period: —
Description: Passive 5%+ stake

Documents

0000932471-02-000276-index.htm

Complete submission

0000932471-02-000276.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC