Filing

SC 13G

SC 13G

0000927016-02-000244·THERMA WAVE INC

Filing metadata

Accession number: 0000927016-02-000244
Form type: SC 13G
Filer: THERMA WAVE INC
CIK: CIK 828119
Filed: Jan 16, 2002
Reporting period: —
Description: Passive 5%+ stake

Documents

0000927016-02-000244-index.htm

Complete submission

0000927016-02-000244.txt

directory listing

Filed by

THERMA WAVE INC