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Filing metadata

Accession number: 0001181431-09-052415
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Nov 18, 2009
Reporting period: Nov 16, 2009
Description: Insider transaction

Documents

0001181431-09-052415-index.htm

Complete submission

0001181431-09-052415.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC