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Filing metadata

Accession number: 0001266457-10-000001
Form type: Form 3
Filer: AMTECH SYSTEMS INC
CIK: CIK 720500
Filed: Mar 16, 2010
Reporting period: Mar 11, 2010
Description: Initial ownership

Documents

0001266457-10-000001-index.htm

Complete submission

0001266457-10-000001.txt

directory listing

Filed by

AMTECH SYSTEMS INC