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Filing metadata

Accession number: 0001181431-10-009531
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 17, 2010
Reporting period: Feb 16, 2010
Description: Insider transaction

Documents

0001181431-10-009531-index.htm

Complete submission

0001181431-10-009531.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC