SC 13G | SEC Filings Hub

Filing metadata

Accession number: 0000950159-10-000130
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 12, 2010
Reporting period: Dec 31, 2009
Description: Passive 5%+ stake

Documents

0000950159-10-000130-index.htm

Complete submission

0000950159-10-000130.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC