SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0000814375-10-000004
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 05, 2010
Reporting period: Jan 04, 2010
Description: Passive 5%+ stake

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0000814375-10-000004-index.htm

Complete submission

0000814375-10-000004.txt

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Filed by

AXCELIS TECHNOLOGIES INC