SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0000354204-10-001351
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 08, 2010
Reporting period: Dec 31, 2009
Description: Passive 5%+ stake

Documents

0000354204-10-001351-index.htm

Complete submission

0000354204-10-001351.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC