SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0000315066-10-001451
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 16, 2010
Reporting period: —
Description: Passive 5%+ stake

Documents

0000315066-10-001451-index.htm

Complete submission

0000315066-10-001451.txt

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Filed by

AXCELIS TECHNOLOGIES INC