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Filing metadata

Accession number: 0001454027-10-000006
Form type: Form 3
Filer: TEGAL CORP /DE/
CIK: CIK 931059
Filed: May 21, 2010
Reporting period: May 19, 2010
Description: Initial ownership

Documents

0001454027-10-000006-index.htm

Complete submission

0001454027-10-000006.txt

directory listing

Filed by

TEGAL CORP /DE/