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Filing metadata

Accession number: 0001181431-10-059891
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Dec 07, 2010
Reporting period: Dec 07, 2010
Description: Insider transaction

Documents

0001181431-10-059891-index.htm

Complete submission

0001181431-10-059891.txt

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Filed by

AXCELIS TECHNOLOGIES INC