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Filing metadata

Accession number: 0001181431-11-006914
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 03, 2011
Reporting period: Feb 02, 2011
Description: Initial ownership

Documents

0001181431-11-006914-index.htm

Complete submission

0001181431-11-006914.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC