SC 13G | SEC Filings Hub

Filing metadata

Accession number: 0001086364-11-002335
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 02, 2011
Reporting period: —
Description: Passive 5%+ stake

Documents

0001086364-11-002335-index.htm

Complete submission

0001086364-11-002335.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC