SC 13G | SEC Filings Hub

Filing metadata

Accession number: 0000814375-11-000004
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 11, 2011
Reporting period: Dec 31, 2010
Description: Passive 5%+ stake

Documents

0000814375-11-000004-index.htm

Complete submission

0000814375-11-000004.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC