SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0001329883-11-000006
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 31, 2011
Reporting period: —
Description: Passive 5%+ stake

Documents

0001329883-11-000006-index.htm

Complete submission

0001329883-11-000006.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC