SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0000315066-11-002283
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 14, 2011
Reporting period: —
Description: Passive 5%+ stake

Documents

0000315066-11-002283-index.htm

Complete submission

0000315066-11-002283.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC