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Filing metadata

Accession number: 0001181431-11-043836
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Aug 04, 2011
Reporting period: Aug 03, 2011
Description: Initial ownership

Documents

0001181431-11-043836-index.htm

Complete submission

0001181431-11-043836.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC