Filing

SC 13G

SC 13G

0001133527-03-000028·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0001133527-03-000028
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 04, 2003
Reporting period: —
Description: Passive 5%+ stake

Documents

0001133527-03-000028-index.htm

Complete submission

0001133527-03-000028.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC