Filing

SC 13G

SC 13G

0001132072-03-000016·IBIS TECHNOLOGY CORP

Filing metadata

Accession number: 0001132072-03-000016
Form type: SC 13G
Filer: IBIS TECHNOLOGY CORP
CIK: CIK 855182
Filed: Feb 10, 2003
Reporting period: Dec 31, 2002
Description: Passive 5%+ stake

Documents

0001132072-03-000016-index.htm

Complete submission

0001132072-03-000016.txt

directory listing

Filed by

IBIS TECHNOLOGY CORP