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Filing metadata

Accession number: 0001181431-03-012372
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jul 01, 2003
Reporting period: Jun 26, 2003
Description: Initial ownership

Documents

0001181431-03-012372-index.htm

Complete submission

0001181431-03-012372.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC