Filing

SC 13G

SC 13G

0000315066-04-000354·AXCELIS TECHNOLOGIES INC

Filing metadata

Accession number: 0000315066-04-000354
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 17, 2004
Reporting period: —
Description: Passive 5%+ stake

Documents

0000315066-04-000354-index.htm

Complete submission

0000315066-04-000354.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC