3 | SEC Filings Hub

Filing metadata

Accession number: 0001415889-24-005744
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 28, 2024
Reporting period: Feb 28, 2024
Description: Initial ownership

Documents

0001415889-24-005744-index.htm

Complete submission

0001415889-24-005744.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC