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Filing metadata

Accession number: 0001209191-21-011356
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 17, 2021
Reporting period: Feb 17, 2021
Description: Insider transaction

Documents

0001209191-21-011356-index.htm

Complete submission

0001209191-21-011356.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC