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Filing metadata

Accession number: 0001181431-13-058894
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Nov 14, 2013
Reporting period: Nov 13, 2013
Description: Initial ownership

Documents

0001181431-13-058894-index.htm

Complete submission

0001181431-13-058894.txt

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Filed by

AXCELIS TECHNOLOGIES INC