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Filing metadata

Accession number: 0001181431-13-003320
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 16, 2013
Reporting period: Jan 15, 2013
Description: Insider transaction

Documents

0001181431-13-003320-index.htm

Complete submission

0001181431-13-003320.txt

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Filed by

AXCELIS TECHNOLOGIES INC