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Filing metadata

Accession number: 0001209191-15-042162
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: May 13, 2015
Reporting period: May 13, 2015
Description: Initial ownership

Documents

0001209191-15-042162-index.htm

Complete submission

0001209191-15-042162.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC