SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0001329883-12-000019
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 08, 2012
Reporting period: —
Description: Passive 5%+ stake

Documents

0001329883-12-000019-index.htm

Complete submission

0001329883-12-000019.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC