SC 13G | SEC Filings Hub

Filing metadata

Accession number: 0000814375-14-000007
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Feb 07, 2014
Reporting period: Dec 31, 2013
Description: Passive 5%+ stake

Documents

0000814375-14-000007-index.htm

Complete submission

0000814375-14-000007.txt

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Filed by

AXCELIS TECHNOLOGIES INC