SC 13G/A | SEC Filings Hub

Filing metadata

Accession number: 0001086364-14-000427
Form type: SC 13G
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 28, 2014
Reporting period: —
Description: Passive 5%+ stake

Documents

0001086364-14-000427-index.htm

Complete submission

0001086364-14-000427.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC