4 | SEC Filings Hub

Filing metadata

Accession number: 0001181431-13-004063
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Jan 22, 2013
Reporting period: Jan 18, 2013
Description: Insider transaction

Documents

0001181431-13-004063-index.htm

Complete submission

0001181431-13-004063.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC