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Filing metadata

Accession number: 0002101601-25-000002
Form type: Form 3
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Dec 22, 2025
Reporting period: Dec 19, 2025
Description: Initial ownership

Documents

0002101601-25-000002-index.htm

Complete submission

0002101601-25-000002.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC