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Filing metadata

Accession number: 0001209191-22-029147
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: May 16, 2022
Reporting period: May 16, 2022
Description: Insider transaction

Documents

0001209191-22-029147-index.htm

Complete submission

0001209191-22-029147.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC