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Filing metadata

Accession number: 0001181431-13-063077
Form type: Form 4
Filer: AXCELIS TECHNOLOGIES INC
CIK: CIK 1113232
Filed: Dec 17, 2013
Reporting period: Dec 17, 2013
Description: Insider transaction

Documents

0001181431-13-063077-index.htm

Complete submission

0001181431-13-063077.txt

directory listing

Filed by

AXCELIS TECHNOLOGIES INC