Schedule 13G ownership disclosure

Axcelis Technologies Inc

Security class unavailable · CUSIP: 054540208

Event date: 2021-12-31

Legacy cover-page extraction is best effort and may not include every reporting person.

Filing-level shares
1,054,871
Percent of class
3.1700%

Amounts are as disclosed in this filing. Schedule type alone does not establish investment intent.

Source: SEC EDGAR filing

Filing metadata

Accession number
0000902664-22-001296
Form type
SC 13G
Filer
AXCELIS TECHNOLOGIES INC
CIK
CIK 1113232
Filed
Feb 09, 2022
Reporting period
Dec 31, 2021
Description
Schedule 13G beneficial ownership

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